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Subject's code : 28805105
PERIOD
CONTENTS
BIBLIOGRAPHY
ACTIVITIES
LENGTH
1st week
Historical evolution
3 hours
Introduction
6 hours
2rd week
Classifications of electronic materials
9 hours
3th week
Semiconductor substrates
4th week
Semiconductor crystals
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L1-Introduction%20Chap%201%20and%202.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L2-Introduction%20Chap%201%20and%202-continued.pdf
http://britneyspears.ac/physics/basics/basics.htm
http://britneyspears.ac/physics/crystals/wcrystals.htm
http://www2.elo.utfsm.cl/~lsb/elo102/datos/microelectronics.pdf
http://www.ieeeghn.org/wiki/index.php/Early_Microelectronics
http://www.radio-electronics.com/info/data/semicond/semiconductor/semiconductor-materials-types-list.php
CONTENtS
5th week
Crystal growth
6th week
Manufacturing processes: Diffusion
Manufacturing processes: Thermal oxidation
7th week
Manufacturing processes: Ion implantation
Manufacturing processes: Rapid Thermal Processing (RTP)
8th week
Thin film
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L3-Diffusion%20Chap%203.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L5-Ion%20Implantation.pdf
Introduction to Microelectronic Technology: Physical Vapor Deposition: Evaporation and
Sputtering
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L12-Physical%20Deposition.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L6-Rapid%20Thermal%20Processing.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L4-Oxidation%20Chap%204.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L13and14-CVD%20and%20Epitaxy.pdf
http://britneyspears.ac/physics/fabrication/fabrication.htm
http://www.circuitstoday.com/integrated-circuits
http://www.circuitstoday.com/monolithic-ic
http://www.circuitstoday.com/photonic-integrated-circuit
http://smithsonianchips.si.edu/ice/cd/BT/SECTION2.PDF
9th week
Photolithography
10th week
Photoresists and Non-optical Lithography
11th week
Vacuum Technology and Plasmas
Etching Techniques
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L11-Etching%20especially%20Plasma%20Etching.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L7-Optical%20Lithography.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L8-Photoresists%20and%20Nonoptical%20Lithography.pdf
http://users.ece.gatech.edu/~alan/ECE6450/Lectures/ECE6450L10-Vacuum%20Science%20and%20Plasmas.pdf
http://britneyspears.ac/physics/fabrication/photolithography.htm
http://www.lithoguru.com/scientist/litho.html
http://www.youtube.com/watch?v=9x3Lh1ZfggM
http://www.lithoguru.com/scientist/lithobasics.html
https://www.memsnet.org/mems/processes/etch.html
http://en.wikipedia.org/wiki/Etching_%28microfabrication%29
12th week
Packaging techniques
System packaging: levels of packaging
13th week
Interconnections in printed circuit boards
Modular assembly
14th week
Environmental and electrical considerations
http://en.wikipedia.org/wiki/List_of_integrated_circuit_packaging_types
http://smithsonianchips.si.edu/ice/cd/BT/SECTION3.PDF
